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Cymer reports major progress on EUV power source

2/16/2012 05:01 PM EST
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resistion
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re: Cymer reports major progress on EUV power source
resistion   2/17/2012 4:37:15 AM
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"Average",+/- some %

resistion
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re: Cymer reports major progress on EUV power source
resistion   2/17/2012 4:50:26 AM
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They don't even have time to baseline a few months so not very reliable.

Respert
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re: Cymer reports major progress on EUV power source
Respert   8/15/2012 9:21:17 PM
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Cymer is running out of idea to increase the power. Never going to hit that 259w mark. Phrasing has change from leading candidate to an option for next generation manufacturing lithography.

resistion
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re: Cymer reports major progress on EUV power source
resistion   6/3/2013 1:46:35 AM
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The thing about prepulse is it is by definition a zero-efficiency (droplets too small) step that still consumes power.

markmhel
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The changes
markmhel   4/10/2014 6:29:05 AM
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All this changes can have that part more than anything to see it wil happen. - Dr. Hicham Riba

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