LONDON – An innovative equity-plus-research funding scheme assembled by lithography tool vendor ASML Holding NV (Veldhoven, The Netherlands) to pay for extreme ultra violet R&D and the transition to 450-mm diameter wafer technologies, is being put in place to produce EUV results in 2018, the company has said. The scheme will have no impact on the current generation of EUV machine, which is already considered to be late to market.
The funding project is also being applied to creating ArF, ArF immersion and KrF lithography systems capable of handling 450-mm diameter wafers, which could arrive sooner than 2018.
ASML is trying to raise 1.38 billion euro (about $1.7 billion) to fund its next phase of EUV lithography and 450-mm diameter wafer development. To help persuade its customers to pay for the R&D ASML is offering the chance to buy up to a 25 percent stake in the company. Intel has signed up to take a 15 percent stake. ASML has said it is still negotiating with Samsung Electronics Co. Ltd. and Taiwan Semiconductor Manufacturing Co. Ltd. over taking up to a 10 percent stake in the company.
When asked how Intel's support would change ASML's EUV roadmap Eric Meurice, CEO, told analysts in a conference call that" "The current EUV program, for which we have committed to customers – and to our shareholders – that we'll be in production in 2014, that's the current machine called the 3300 [NXE:3300] will not be impacted at all. We think we will be there. We will have the specification. We don't need additional funding to succeed there."
Meurice continued: "The additional funding, however, will help us in version expected in 2018, which is a significant undertaking; it has a bigger lens, it has a bigger need for higher power and is a significant challenge in overlay and it is going to be 300- and 450-mm compatible. That's a big project for 2018. This is the one we want to secure with this additional funding."
Peter Wennink, CFO of ASML, told the analysts that because the EUV machines have been designed to be capable of upgrading to 450-mm wafers most of the 450-mm development spending would be on preparing 450-mm capable lithography systems based on ArF and KrF. No timetable was given for when these machines would be made available.
The main issue is that at the 300-mm transition the chipmakers pressured the equipment makers to take on all the risk saying that the first companies to offer 300-mm versions in various equipment categories would "clean up" and get lets of orders.
The the 300-mm transition stalled (I forget why, but i think there was some economic crash or others) and was long and drawn out. The second movers were able to catch up and a lot of equipment makers got burned.
This time around we are down to close to monopoly suppliers...ASML, Applied Materials ...and they are starting to tell customers.....you want this work doing...you got to foot the bill...up front....and sign some purchase orders.
Moore's law is not so much about getting more transistors on a wafer by making them smaller, it's basically about reducing the cost per transistor.
Making transistors smaller using EUV is at the moment too expensive so reducing the cost per transistor by moving to 450nm is the logic way to go and meet Moore's law.
I don`t see samsung joining, simply bcoz IBM, GLOFO and the rest will not be happy and its not certain ASML will produce the results, if ASML fail, thIeR shares will tank and the money invested will be lost..
I think TSMC will join (best case scenario)
I can smell the desperation of intel, while competitors is chasing closer from everywhere, there is only one direction, up. and there is only sky there and it don't have a wing...
they better invest in CERN as well, they could offer quark level tech for them.
Intel must double-down on 450mm because growing millimeters of silicon diameter is cheaper and far more predictable than reducing electromagnetic wavelengths to X-ray range. Presumably, ASML can build a 450mm stage (other, much smaller companies are) with greater success than the SXPL machine they are trying to build. Meanwhile, they sell multiple profitable immersion tools for optical multi patterning.
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