Right now Cymer Inc. (San
Diego, Calif.) is the leading supplier of a source for ASML EUV
lithography systems. The company recently posted its 2Q12 financial
results in which it made a net income of $9.6 million on sales revenue
of $149.3 million compared to revenue of $158.2 million in the second
quarter of 2011, and revenue of $150.5 million in the first quarter of
Sales and profits were all down slightly on sequential and
year-on-year bases but that could turnaround when it starts shipping
some very expensive sources for EUV machines.
The company said it
is continuing with development and commercialization of EUV sources and
demonstrated improved expose power performance and collector lifetimes
and the viability of collector refurbishment.
Cymer’s EUV sources
are now said to deliver a reliable 50 W output at a duty cycle of 40
percent. Not quite enough for ASML and its customers but the laboratory
Cymer is said to have demonstrated 158 watt EUV source with a CO2 drive
Cymer has begun integration and testing of its first
source for the NXE:3300 EUV machine. As ASML has orders for 15 of the
giant expensive machines it is Cymer's race to lose.
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