Breaking News
News & Analysis

Sematech makes EUV mask progress

8/15/2012 10:35 AM EDT
3 comments
NO RATINGS
More Related Links
View Comments: Newest First | Oldest First | Threaded View
Diogenes53
User Rank
Rookie
re: Sematech makes EUV mask progress
Diogenes53   8/18/2012 4:22:37 AM
NO RATINGS
X-ray masks will be ready before the x-ray stepper can use them. And the mask makers will have lost $$$ on their development. With all the $$$ flowing into ASML to help them with 450mm, perhaps some should dribble to maskmakers.

any1
User Rank
CEO
re: Sematech makes EUV mask progress
any1   8/15/2012 1:00:19 PM
NO RATINGS
Masks have always been an issue for Xray ...oops I mean EUV litho. Really, the masks pretty much need to be perfect as far as detectable defects are concerned for high volume manufacturing. For reflective optical elements at EUV wavelengths this is both difficult and expensive to achieve. It will be a continuing issue for EUV litho despite these types of press releases.

resistion
User Rank
CEO
re: Sematech makes EUV mask progress
resistion   8/15/2012 12:26:07 PM
NO RATINGS
8/(13.2*13.2)=0.046/cm^2 @50 nm is far from ready.

Most Recent Comments
Ian Johns
 
Teno
 
Ian Johns
 
Rainerh_#1
 
David Ashton
 
antedeluvian
 
Rainerh_#1
 
antedeluvian
 
David Ashton
Top Comments of the Week
August Cartoon Caption Winner!
August Cartoon Caption Winner!
"All the King's horses and all the KIng's men gave up on Humpty, so they handed the problem off to Engineering."
5 comments
Like Us on Facebook

Datasheets.com Parts Search

185 million searchable parts
(please enter a part number or hit search to begin)
EE Times on Twitter
EE Times Twitter Feed
Radio
LATEST ARCHIVED BROADCAST
David Patterson, known for his pioneering research that led to RAID, clusters and more, is part of a team at UC Berkeley that recently made its RISC-V processor architecture an open source hardware offering. We talk with Patterson and one of his colleagues behind the effort about the opportunities they see, what new kinds of designs they hope to enable and what it means for today’s commercial processor giants such as Intel, ARM and Imagination Technologies.
Flash Poll