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X-Fab MEMS foundry goes 3-D

9/12/2012 08:38 AM EDT
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docdivakar
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re: X-Fab MEMS foundry goes 3-D
docdivakar   9/13/2012 5:15:50 PM
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@Peter Clarke: I think the word 3-D is confusing to us engineers in this context -MEMS have been 3D from day one, in comparison to their planar cousins in the analog/digital IC. Whether capacitive or proof-mass type, MEMS accelerometers Do you mean 3-axis for example have the z-axis feature not too small in comparison to X-Y. Did you mean to say 3-axis or triaxial above? MP Divakar

docdivakar
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re: X-Fab MEMS foundry goes 3-D
docdivakar   9/13/2012 5:23:29 PM
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The message above got garbled, please READ THIS: @Peter Clarke: I think the word 3-D is confusing to us engineers in this context -MEMS have been 3D from day one, in comparison to their planar cousins in the analog/digital IC world. Whether capacitive or proof-mass type, MEMS accelerometers for example have the z-axis features not too small in comparison to X-Y. Did you mean to say 3-axis or triaxial above? MP Divakar

Peter Clarke
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re: X-Fab MEMS foundry goes 3-D
Peter Clarke   9/28/2012 9:43:21 AM
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@Docdivakar Good point. You are right....MEMS process for tri-axis sensors is a better description

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