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Wafer inspection gets smart

4/23/2012 08:16 PM EDT
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R_Colin_Johnson
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re: Wafer inspection gets smart
R_Colin_Johnson   4/25/2012 4:44:00 PM
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Wafer inspection, metrology and the other smart functions performed by KLA-Tencor's new tool have their own advantages, as enumerated in my story, but one thing I forgot to mention, is the clean-room floor space that is saved, since all these different functions--and the abiilty to process two batches simultaneously--usually requries separate tools that obviously take up more of the valuable space in the clearroom.

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