Breaking News
News & Analysis

Wafer inspection gets smart

4/23/2012 08:16 PM EDT
1 Comment
NO RATINGS
View Comments: Oldest First | Newest First | Threaded View
R_Colin_Johnson
User Rank
Blogger
re: Wafer inspection gets smart
R_Colin_Johnson   4/25/2012 4:44:00 PM
NO RATINGS
Wafer inspection, metrology and the other smart functions performed by KLA-Tencor's new tool have their own advantages, as enumerated in my story, but one thing I forgot to mention, is the clean-room floor space that is saved, since all these different functions--and the abiilty to process two batches simultaneously--usually requries separate tools that obviously take up more of the valuable space in the clearroom.

Most Recent Comments
Rcurl
 
Rcurl
 
Rcurl
 
KarlS01
 
RGRU
 
steve.taranovich
 
Steve Manley
 
Max The Magnificent
 
Susan Rambo
Flash Poll
Radio
LATEST ARCHIVED BROADCAST
EE Times editor Junko Yoshida grills two executives --Rick Walker, senior product marketing manager for IoT and home automation for CSR, and Jim Reich, CTO and co-founder at Palatehome.
Like Us on Facebook

Datasheets.com Parts Search

185 million searchable parts
(please enter a part number or hit search to begin)
EE Times on Twitter
EE Times Twitter Feed
Top Comments of the Week