Embedded Systems Conference
Breaking News
News & Analysis

Wafer inspection gets smart

4/23/2012 08:16 PM EDT
1 Comment
NO RATINGS
View Comments: Oldest First | Newest First | Threaded View
R_Colin_Johnson
User Rank
Author
re: Wafer inspection gets smart
R_Colin_Johnson   4/25/2012 4:44:00 PM
NO RATINGS
Wafer inspection, metrology and the other smart functions performed by KLA-Tencor's new tool have their own advantages, as enumerated in my story, but one thing I forgot to mention, is the clean-room floor space that is saved, since all these different functions--and the abiilty to process two batches simultaneously--usually requries separate tools that obviously take up more of the valuable space in the clearroom.

Most Recent Comments
resistion
 
resistion
 
resistion
 
resistion
 
Ron Neale
 
resistion
 
resistion
 
resistion
 
R_Colin_Johnson
Most Recent Messages
8/29/2015
8:48:52 AM
Flash Poll
Like Us on Facebook

Datasheets.com Parts Search

185 million searchable parts
(please enter a part number or hit search to begin)
EE Times on Twitter
EE Times Twitter Feed
Top Comments of the Week