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TSMC starts FinFETs in 2013, tries EUV at 10 nm

4/11/2013 12:18 PM EDT
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resistion
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re: TSMC starts FinFETs in 2013, tries EUV at 10 nm
resistion   6/2/2013 9:43:50 AM
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EUV source wall-plug power is 0.5 megawatt. Crazy. http://semimd.com/watts/2013/03/14/cymer’s-euv-team-has-an-exciting-few-months/

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