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Researchers develop novel form of hafnium oxide

2/7/2012 12:13 PM EST
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Peter Clarke
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re: Researchers develop novel form of hafnium oxide
Peter Clarke   2/8/2012 12:31:09 PM
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As far as I am aware it is pretty universally carefully engineered hafnium oxide used in HKMG. Not sure how significant amorphous hafnium oxide will play there as we are already down at very few crystal layers.

phoenixdave
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re: Researchers develop novel form of hafnium oxide
phoenixdave   2/7/2012 1:03:36 PM
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Hafnium ox is currently widely used and planned for most high-k metal processes (such as Intel).

resistion
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re: Researchers develop novel form of hafnium oxide
resistion   2/7/2012 12:45:11 PM
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Is there still continued interest in Hf oxide as opposed to, say, Zr oxide or other high-k?

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