Breaking News
Research

Maskless e-beam litho good for 14-nm , says CEA-Leti

2/13/2012 02:37 PM EST
5 comments
NO RATINGS
More Related Links
View Comments: Newest First | Oldest First | Threaded View
resistion
User Rank
CEO
re: Maskless e-beam litho good for 14-nm , says CEA-Leti
resistion   2/22/2012 2:32:08 AM
NO RATINGS
If there is a fast (10-100 wph) low-energy (less than keV) e-beam ready at 14 nm or 10 nm, that would be an EUV-killer.

Brutus_II
User Rank
Manager
re: Maskless e-beam litho good for 14-nm , says CEA-Leti
Brutus_II   2/14/2012 5:10:52 PM
NO RATINGS
Electron microscopes have been converted to e-beam litho at a cost of about $100k that produce 20nm line widths. These can be used for very limited production. The new vector scan (shaped beams) are very expensive (I think they're over $6kk per machine), which makes it questionable whether it's practical to simply add more machines to make up for the lack of processing speed.

DanielRavenNest
User Rank
Rookie
re: Maskless e-beam litho good for 14-nm , says CEA-Leti
DanielRavenNest   2/14/2012 1:00:28 AM
NO RATINGS
It depends on the cost of the machine. If it's maskless and does not require expensive EUV sources and mirrors, the machine could be potentially less expensive. In that case you just buy more machines to reach the production rate you want.

any1
User Rank
CEO
re: Maskless e-beam litho good for 14-nm , says CEA-Leti
any1   2/14/2012 12:55:42 AM
NO RATINGS
I think that are many companies that would use a 10 wafer per hour direct write ebeam tool. Mask costs near leading edge nodes are quite expensive - as are any alternative lithography approaches. And it's likely that throughput would be even higher at higher design nodes. For small volumes and rapid prototyping it would be valuable. And of course some people would be interested in it as a faster mask writing tool.

mcgrathdylan
User Rank
Blogger
re: Maskless e-beam litho good for 14-nm , says CEA-Leti
mcgrathdylan   2/13/2012 7:00:23 PM
NO RATINGS
A promising development, but even if they make it to 10 wafers per hour, how many manufacturers will embrace this technology?

August Cartoon Caption Winner!
August Cartoon Caption Winner!
"All the King's horses and all the KIng's men gave up on Humpty, so they handed the problem off to Engineering."
5 comments
Top Comments of the Week
Like Us on Facebook

Datasheets.com Parts Search

185 million searchable parts
(please enter a part number or hit search to begin)
EE Times on Twitter
EE Times Twitter Feed
Flash Poll
Radio
NEXT UPCOMING BROADCAST
How to Cope with a Burpy Comet
October 17, 2pm EDT Friday
EE Times Editorial Director Karen Field interviews Andrea Accomazzo, Flight Director for the Rosetta Spacecraft.