SAN JOSE -- Silicon Valley Group here has appointed Richard Savage todirect all new product development for SVG Thermal Systems as vice president of research and development.
"Richard is a strategic, long-term thinker," said Jeff Kowalski, SVG
Thermal Systems president. "Richard's varied background makes him a
perfect fit at SVG. He has an entrepreneurial vision and creative
ability that will drive SVG's next-generation products and meet the
changing needs of our customers worldwide."
Last July, SVG acquired Watkins-Johnson Inc.'s Semiconductor Equipment Group, where Savage served as director of systems engineering since November 1997. Previously, he was director of process technology for SVG Track Systems, responsible for the field and applications lab
process groups, 300-mm process module development/design and strategic technology programs.
Savage started his career working in R&D developing inductively-coupled
plasma sources for optical spectroscopy with Thermo-Jarrell-Ash in
Boston. He holds Ph.D. in analytical and physical chemistry
from Indiana University. For the past 19 years, Savage has been
developing and marketing semiconductor equipment for metrology, etching,
plasma etching/CVD and photolithography.