BERKELEY, Calif.--Ion Systems Inc. and Monroe Electronics have jointly developed a new digital charged plate monitoring tool, which gauges the performance of air ionization equipment in plants producing semiconductors, storage disks, and flat-panel displays. The microprocessor-based tool also monitors charge accumulation in cleanrooms to protect against electrostatic discharge.
"Combining the expertise of our companies has yielded a new charged plate monitor (CPM) that meets the increasing demands of today's manufacturing requirements, as well as those of future product generations," said Jim Heminway, director of marketing and sales for Monroe Electronics, based in Lyndonville, N.Y. "The digital CPM truly represents the next step in ionization and surface charge monitoring. The transition to next-generation devices in ourvertical markets is supported by the technology used in the digital CPM, making it an important element of an advanced electrostatics management program," he added.
Two years ago, the two companies saw a need for a more precise, easy-to-use measurement tool for semiconductor, disk, and display manufacturing. The development project was started about 18 months ago.
The digital CPM system has been designed with simple user interface that encompasses one-button push testing and a large liquid crystal display screen (LCD). The charged plate monitor can be programmed by the user for start, stop, charging voltages, and duration of the test. Memory data for more than 100 locations can be assessed and subsequently downloaded into a user's PC for evaluation.
The digital CPM system will be manufactured by Monroe Electronics, will be sold by Berkeley-based Ion Systems as the Model 280 CPM and by Monroe Electronics as the Model 288 CPM.