KIRCHHEIM, Germany -- Philips Semiconductors has ordered its 12th plasma system from TePla AG here, the German company said today.
"This order strengthens our relationship with a key customer in the semiconductor industry," said Friedrich G. Meyer, managing board director of TePla AG. "With TePla, Philips Semiconductors decides in favor of a technology leader in the field of microwave induced plasma."
The plasma system sold to Philips Semiconductors will be used to remove photoresist masks. While each silicon wafer needs to be cleaned individually in traditional processes, TePla systems can clean up to 50 wafers in one step. This means easy handling and considerably reduced costs.
"Our aim is to further strengthen our position as technology leader in the future," said Meyer, "we will present the next generation of plasma systems for the semiconductor industry to experts at the Productronia in November."