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Applied tips dielectric etch tool for 3-D NAND production

6/27/2012 11:31 AM EDT
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resistion
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re: Applied tips dielectric etch tool for 3-D NAND production
resistion   6/27/2012 12:25:54 PM
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But so far the plan is to make it with current equipment, a la Toshiba.

mcgrathdylan
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re: Applied tips dielectric etch tool for 3-D NAND production
mcgrathdylan   6/28/2012 11:25:45 PM
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@resistion- is this what Toshiba plans to do in production? I asked this question of Applied, and I was told that basically this is going to require new etch equipment, either from Applied or one of its competitors.

resistion
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re: Applied tips dielectric etch tool for 3-D NAND production
resistion   6/29/2012 3:26:38 PM
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I'm sure the new etcher will be implemented after the introduction on current equipment. If it can't use current equipment for, say 8-16 layers, then this technology will be a little late.

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