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Advantages of SONOS memory for embedded flash technology

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ramkumar001
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re: Advantages of SONOS memory for embedded flash technology
ramkumar001   10/11/2011 8:20:57 PM
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No. This process uses one poly dep and one mask for all devices

ramkumar001
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re: Advantages of SONOS memory for embedded flash technology
ramkumar001   10/11/2011 8:19:59 PM
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Yes, it is used to define the SONOS areas for implant and other device related steps

ScottenJ
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re: Advantages of SONOS memory for embedded flash technology
ScottenJ   10/5/2011 7:40:02 PM
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I would not expect the ONO and Gox heights to be different enough to require an extra poly mask.

resistion
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re: Advantages of SONOS memory for embedded flash technology
resistion   10/4/2011 4:49:02 AM
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So why hasn't SONOS been able to displace floating gate across the board for all Flash products?

watelzbuddy
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re: Advantages of SONOS memory for embedded flash technology
watelzbuddy   10/2/2011 4:05:11 PM
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If ONO height is not matching with other oxide GOX thickness probably POLY mask is going to be different right?

ScottenJ
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re: Advantages of SONOS memory for embedded flash technology
ScottenJ   10/1/2011 2:21:59 AM
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What are the three added masks. I see a deep N well and presumably a mask is required to selectively remove the ONO, what is the third? Some kind of Vt adjust or?

JanineLove
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re: Advantages of SONOS memory for embedded flash technology
JanineLove   9/29/2011 2:10:32 PM
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Earlier this year, Cypress and UMC told me about their new 65nm SONOS process for embedded flash. I asked Cypress to write up an article on the technology, and here it is. If you have any questions for Ramkumar or Bo, please hit the comments section below.

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