Breaking News
Design How-To

FinFET structure design and variability analysis enabled by TCAD

NO RATINGS
Page 1 / 3 Next >
More Related Links
View Comments: Newest First | Oldest First | Threaded View
Adele.Hars
User Rank
Rookie
re: FinFET structure design and variability analysis enabled by TCAD
Adele.Hars   10/12/2012 12:26:26 PM
NO RATINGS
Hmm. In a presentation at the SOI Conference last week, IBM painted a very different picture. It would be interesting to get their take here.

Victor Moroz
User Rank
Rookie
re: FinFET structure design and variability analysis enabled by TCAD
Victor Moroz   10/11/2012 4:49:54 PM
NO RATINGS
Adele, the industry is making bulk FinFETs due to the lower cost. There are no serious advantages in SOI FinFETs as long as you can keep consistent fin height in bulk FinFETs, and it was reported to be +-1nm at VLSI Technology conference this year. The channel-stop doping is below the fin channel and has a negligible impact on the overall variability.

Adele.Hars
User Rank
Rookie
re: FinFET structure design and variability analysis enabled by TCAD
Adele.Hars   10/11/2012 2:51:56 PM
NO RATINGS
Victor, have you looked at FinFET on SOI? Re: fin shape, the GSS guys (and others) are saying FinFETs would be better for power, perf & mfg on SOI (see http://www.advancedsubstratenews.com/2012/08/power-performance-gss-sees-soi-advantages-for-finfets/ ) And with respect to variability, with an SOI FinFET, you don't dope, so you don't have the RDF problem. Modeling guru Jerry Fossum very eloquently explained it a five (!) years ago (see http://www.advancedsubstratenews.com/2007/05/a-perspective-on-multi-gate-mosfets/ ). Your thoughts?

August Cartoon Caption Winner!
August Cartoon Caption Winner!
"All the King's horses and all the KIng's men gave up on Humpty, so they handed the problem off to Engineering."
5 comments
Top Comments of the Week
Like Us on Facebook

Datasheets.com Parts Search

185 million searchable parts
(please enter a part number or hit search to begin)
EE Times on Twitter
EE Times Twitter Feed
Flash Poll
Radio
NEXT UPCOMING BROADCAST
How to Cope with a Burpy Comet
October 17, 2pm EDT Friday
EE Times Editorial Director Karen Field interviews Andrea Accomazzo, Flight Director for the Rosetta Spacecraft.