Cleveland, Ohio—Keithley Instruments' new 140-page handbook, "Overcoming the Measurement Challenges of Advanced Semiconductor Technologies: DC, Pulsed, and RF—From Modeling to Manufacturing" describes emerging measurement challenges for semiconductor manufacturers as they move into the 65 nm technology node and beyond.
The handbook, available free by request at http://www.keithley.com/pr/014 (user registration required) or by calling 1-800-KEITHLEY, draws from the collective experience of Keithley's parametric test and device characterization experts and the company's customers. The tutorial covers a variety of emerging technologies and processes, including challenges in RF wafer testing, gate dielectric reliability testing, charge pumping and reliability, high-frequency capacitance measurement, testing of copper vias, and advanced source measurement unit (SMU) techniques.
The handbook also contains a broad glossary of commonly used terms in the semiconductor industry, including test and measurement terminology.
Keithley Instruments, 1-888-KEITHLEY, www.keithley.com