Magma Design Automation Inc. has released Excalibur-Litho, a complete fab analysis framework that supports the development and monitoring of advanced lithography solutions.
Excalibur-Litho integrates design and real-time data from the manufacturing floor, including defectivity, metrology and tool history. Excalibur-Litho optimizes yield ramps with built-in solutions for litho qualification through the proprietary coupling of design-based binning, electrical cross mapping, and fab-wide data correlation.
. Detection of systematic printing errors,
. Layout sensitivity quantification,
. Optical simulation consistency,
. Process window qualification,
. Rapid yield loss localization,
. Cross mapping and data mining
Excalibur-Litho is coupled with an open-architecture database developed by Magma that enables safe CAD access and easy fab integration. Excalibur-Litho optimizes yield ramp with built-in solutions for litho qualification through design-based binning (DBB) and supports the deployment of CAD-based defect and metrology monitoring for large-scale production activities.
To access Excalibur-Litho's datasheet, click here