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Cobalt Encapsulation Extends Copper to 10nm
5/13/2014

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The new Endura Volta CVD Cobalt tool encapsulates copper features in cobalt to prevent voids and electromigration.
The new Endura Volta CVD Cobalt tool encapsulates copper features in cobalt to prevent voids and electromigration.

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Kinnar
User Rank
CEO
This will add safety margin to the interconnections
Kinnar   5/14/2014 6:00:49 AM
NO RATINGS
This development will add safety margin in the interconnections on the fabricated ICs. Developments in-terms of interconnections is also welcome as compared to fabrication developments.

R_Colin_Johnson
User Rank
Blogger
Re: copper
R_Colin_Johnson   5/14/2014 12:56:30 AM
NO RATINGS
KLA divested Blue29 in 2006, but Bloomberg claims they are still around.

walken1
User Rank
Rookie
Re: copper
walken1   5/13/2014 9:51:45 PM
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I thought there was a company called Blue29 that developed a cobalt tungsten phosphide barrier seed technology over a decade ago to address this very issue.  They had funding from KLA-Tencor and others.  Whatever happened to them? 

R_Colin_Johnson
User Rank
Blogger
Re: copper
R_Colin_Johnson   5/13/2014 4:21:17 PM
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i guess for old-timers like me I should call aluminum traditional, but ya gotta keep up with the lingo.

Phononscattering
User Rank
Rookie
copper
Phononscattering   5/13/2014 3:27:33 PM
NO RATINGS
It's neat how copper is called "traditional".

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