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Samsung Describes 10nm SRAM

Area-optimized design shows 38% shrink
2/4/2016 08:00 AM EST
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resistion
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Re: metal and contacted poly pitch
resistion   2/6/2016 8:29:29 PM
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Thanks, I was just wondering if they had released such numbers but probably not. It's true one can get an estimate of 63 nm gate pitch from the sketch, if it is drawn to scale, with the correct aspect ratio.

AKH0
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Re: metal and contacted poly pitch
AKH0   2/5/2016 1:00:17 PM
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You can calculate the gate pitch from the diffrence in the area of the two SRAM cells. Assuming that the min fin pitch is 40nm (limited by SADP and 80nm litho):

1-1-1: 2 CPP x W = 0.04

1-2-2: 2 CPP x (W + 0.08) = 0.049

That gives CPP=56nm and W=355nm (8.5 FP).

You can redo this with a more aggressive FP assumption.

You won't see minimum metal pitch in the SRAM, but 0.7X from 64nm is 45nm and still within the reach of DP.

resistion
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metal and contacted poly pitch
resistion   2/5/2016 3:58:17 AM
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Did they disclose their metal and contacted gate pitch?

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