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EUV in Focus at Photonics West

Gigaphoton updates progress on light source
1/25/2017 00:01 AM EST
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resistion
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Re: pellicles vs. power for EUV
resistion   1/26/2017 2:18:14 AM
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Good to know, thanks Rick.

rick merritt
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Re: pellicles vs. power for EUV
rick merritt   1/25/2017 12:22:56 PM
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An Steegen of Imec gave a brief update on pellicle development at ISS earlier this month, noting researchers are experimenting with using carbon nanotube coatins but have yet to prove whether they can withstand a future 250W light source.

See http://www.eetimes.com/document.asp?doc_id=1331185&page_number=5

 

resistion
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pellicles vs. power for EUV
resistion   1/25/2017 11:00:10 AM
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Higher EUV power makes pellicles hotter, they get degraded. 80W already the current limit.

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