Wennik said the 21 systems in the pipeline are ticketed for five separate customers, presumably Intel, Samsung, TSMC and Globalfoundries among them. Wennik said ASML is close to landing EUV orders from two additional customers, an indication that other top chip makers are making to deploy EUV close on the heels of Intel, TSMC and Samsung.
"It was clear, of course, that it's the 'top three' leading the pack in terms of of EUV introduction, but the others are clearly following," Wennink said.
ASML's progress on EUV was the highlight of an overall strong quarterly financial report in which the company exceeded consensus analysts' expectations for sales and profit.
"We started this year with a very strong quarter and we expect this momentum to carry throughout the year," Wennink told analysts on the conference call.
ASML reported net sales for the first quarter of 1.94 billion euro (about $2.08 billion), an increase of 2 percent sequentially and an increase of 46 percent year-over-year. The company reported a net income for the quarter of 452 million euro (about $484 million), down 14 percent from the previous quarter but up 128 percent compared with the year-ago quarter.
For the second quarter, ASML said it expects sales to be between 1.9 billion euro and 2 billion euro, slightly below consensus analysts' expectations.
—Dylan McGrath is the editor-in-chief of EE Times.