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Graphene MEMS Outperforms Silicon
7/10/2013

Graphene strain gauge (black) here shown in a scanning electron microscope (SEM) image is seen in sharp contrast to the surrounding silicon dioxide (SiO2) layer (grey).
Graphene strain gauge (black) here shown in a scanning electron microscope (SEM) image is seen in sharp contrast to the surrounding silicon dioxide (SiO2) layer (grey).

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Frank Eory
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Manufacturability
Frank Eory   7/10/2013 11:18:58 AM
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I would like to have read some discussion about how graphene fits into the standard silicon MEMS manufacturing process.

Tom Murphy
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Re: Manufacturability
Tom Murphy   7/10/2013 11:31:04 AM
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Frank: I'm with you.  The advance in research and theory is always inspiring, but I'd be interested to know where this is in the pipleline that flows from academia to the production flaw.  We know that some technologies never make it all the way through, but it's nice to keep an eye on their progress. 

Does anyone know, or can even speculate, on how long it typically takes for such advances to result in a practical prototype of an actual product?  Surely, there's some sort of rule of thumb on that...?

Kinnar
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Many more areas of exploration using the similar techniuqe
Kinnar   7/10/2013 3:49:42 PM
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It is just a start, I think all the sensors associated with either of  force/pressure/vibration will be having a complete makeover and miniaturization of their size and shape. But the durability will be the property of testing still.

krisi
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Re: Many more areas of exploration using the similar techniuqe
krisi   7/10/2013 3:55:12 PM
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Any idea how far from commercial reality is this research discovery?

Kinnar
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Re: Many more areas of exploration using the similar techniuqe
Kinnar   7/10/2013 4:17:23 PM
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I think the newer MEMS will not a problem as far as manufacturing is concern, as they have already a prototype (As seen from the picture in the article). But application and acceptance will be dependent on the manufacturers' efforts.

krisi
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Re: Many more areas of exploration using the similar techniuqe
krisi   7/10/2013 4:33:57 PM
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as Tom mentioned the path from protype to a commercial products can be long...I would give it 5 years in this case...graphene is very emerging material

R_Colin_Johnson
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Re: Manufacturability
R_Colin_Johnson   7/10/2013 6:42:17 PM
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The graphene here was deposited with chemical vapor deposition (CVD) which is relatively easy to do for small islands, but impossibly difficult to grow across a whole wafer. The rest of the process was typical MEMS--deposit on SiO2, etch out the SiO2 underneath the graphene (see black slit in photo), leaving a suspended membrane.

R_Colin_Johnson
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Re: Many more areas of exploration using the similar techniuqe
R_Colin_Johnson   7/10/2013 6:47:35 PM
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All the major semiconductor makers are working on graphene deposition in hopes of bringing this new material into the CMOS workflow. Many of them tell me they are close, but my experience has been that it takes as long as a decade to introduce a new material..

R_Colin_Johnson
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Details in the Paper
R_Colin_Johnson   7/10/2013 8:29:47 PM
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A paper spelling out all the details can be viewed at:

http://arxiv.org/ftp/arxiv/papers/1306/1306.5876.pdf

 

docdivakar
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Re: Graphene MEMS Outperforms Silicon
docdivakar   7/16/2013 8:43:49 PM
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It is a long way to productization of Graphene-based MEMS. As many commentors pointed out below, the manufacturing infrastructure for MEMS, in particular the backend part will see major disruptions with the introduction of such devices. Etching out SiO2 underneath the Graphene to the accuracy needed is no walk in the park!

More over, other 'mechanical' responses of MEMS need to be innovated with Graphene.

MP Divakar

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