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What is source-mask optimization?

Brion rolls Tachyon SMO
2/27/2009 05:00 AM EST
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resistion
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Influence of noise
resistion   1/5/2016 6:51:09 PM
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Source-mask optimization involves re-adjustment of point sources of light in the pupil. There could be some noise impact, especially if these are small dose components. It is even more severe for EUV.

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