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TSMC starts FinFETs in 2013, tries EUV at 10 nm

Next up—the 20-nm node
4/11/2013 12:18 PM EDT
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resistion
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re: TSMC starts FinFETs in 2013, tries EUV at 10 nm
resistion   4/11/2013 7:27:16 PM
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Won't even have enough EUV tools by 2015 for 10 nm.

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