Tech Papers
Controlling Tolerance and Determinism: Embedded Applications for an IO Device
MKS Instruments
Chris AmbrozicWhite Paper
April 2011
Comment
prabhakar_deosthali
A good article explaining the tightrope situation in which today's control ...
Different equipment characteristics combine to determine the overall precision and accuracy of a given manufacturing tool. This paper focuses on those characteristics of equipment controllers that can be optimized for more precise and accurate process control. Specifically, there are certain characteristics that are exhibited by the control hierarchy and equipment configuration used in a wafer processing tool that are critical for meeting today's challenges of very small geometries and tight process tolerances. Two control characteristics that play defining roles in achieving the level of process control necessary for semiconductor device manufacture are the latency and determinism of the control process.
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prabhakar_deosthali
4/29/2011 10:35 AM EDT
A good article explaining the tightrope situation in which today's control systems have to work. Apart from the right kind of RTOS which will minimize the interrupt latency, it is also important to keep any on-the-fly calculations or interpolations to the minimum while controlling a tool position or tool path.
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