Burn Lin, Chris Mack
Burn Lin Senior director of the micropatterning division at Taiwan Semiconductor Manufacturing Co. Ltd.
"The industry is betting too much on one horse. I think it's dangerous to bet on one horse. A lot of people know that."
Chris Mack Consultant and "gentleman scientist"
"It's always risky to bet on one technology that is high risk and not pursue others simultaneously. And I think it's been a little bit out of whack that we've invested too much in trying to make EUV successful and getting too emotionally attached when you say, 'We've got to make sure we're not distracted by these other technologies, so we're going to make sure that only EUV is the one we focus on.' I don't have a lot of complaints that EUV got a lot of funding. What I've got a complaint about is when people try to limit the other options that are the competitors.
"I am an 'optical forever' guy. I am a big proponent of doing more [research] on line-edge roughness. I think longer-term research on subassembly is something we should be doing. It was very premature to give up on some of the high-index materials development. If we have stayed the course, I think those high-index materials would have been there to extend double patterning another generation."