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TSMC to make FinFETs in 450-mm fab

Mark Lapedus

2/28/2011 5:49 PM EST

Drop in the (450-mm) bucket
It could cost about $12 billion in R&D investments for 450-mm, Muse said. ''The move to 300-mm was very much more expensive than the prior wafer transitions. While estimates from VLSI/Sematech suggest the 125-mm transition cost only ~$250-300 million and the 150-mm transition ~$700 million, the 300mm cost ~$12 billion,’’ he said.

''It is assumed that the 450-mm transition will not be cheap, and clearly equipment companies are reluctant to pay the full tab. We will likely see a chicken and egg game, but we do expect chipmakers to help support the tool development efforts with equipment companies, at the same time, sharing some of the higher dollars received in the current golden era of capital intensity,’’ he said.




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