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peter.clarke
resistion
Does Mapper approve its lens system to be made at the Russian site? Is that site ...
Russia backs e-beam lithography firm
Peter Clarke
8/28/2012 4:35 AM EDT
Three more years
The investment is earmarked to build a Matrix 1.1 machine that uses 1,326 beams to deliver a throughput of one wafer per hour. A proposed Matrix 10.1 machine, using 13,260 beams, would be capable of a throughput of 10 wafers per hour while Matrix 10.10 – a clustered version composed of ten Matrix 10.1 machines, would be capable of delivering 100 wafers per hour.
The MEMS-based lens components system, one of Mapper's major innovations, is now set to be made at a Russian MEMS fab. In addition, the investment is expected to develop scientific cooperation with leading Russian research institutes.
"Mapper stands at the very beginning of the semiconductor value chain, so this investment strengthens the synergy among Rusnano's microelectronic projects," said Rusnano managing director Dmitriy Lisenkov, in a statement issued by Mapper.
The Imagine project conducted between Mapper, TSMC and CEA-Leti has resolved 22-nm lines, spaces and contract holes in positive chemically amplified resist. This is said to be sufficiently dense for 14-nm and 10-nm logic manufacturing process technology nodes.
CEA-Leti has had a pre-alpha machine since mid-2009. Now CEA-Leti will receive one of the first Matrix systems to enable continuation of the Imagine research program for three years more years.
Related links and articles:
www.mapperlithography.com
www.rusnano.com
News articles:
TSMC set to receive Matrix e-beam litho machine
Maskless e-beam litho good for 14-nm, says CEA-Leti
Russia drives into U.S. fabless funding
Crocus appoints CEO for Russian MRAM fab
The investment is earmarked to build a Matrix 1.1 machine that uses 1,326 beams to deliver a throughput of one wafer per hour. A proposed Matrix 10.1 machine, using 13,260 beams, would be capable of a throughput of 10 wafers per hour while Matrix 10.10 – a clustered version composed of ten Matrix 10.1 machines, would be capable of delivering 100 wafers per hour.
The MEMS-based lens components system, one of Mapper's major innovations, is now set to be made at a Russian MEMS fab. In addition, the investment is expected to develop scientific cooperation with leading Russian research institutes.
"Mapper stands at the very beginning of the semiconductor value chain, so this investment strengthens the synergy among Rusnano's microelectronic projects," said Rusnano managing director Dmitriy Lisenkov, in a statement issued by Mapper.
The Imagine project conducted between Mapper, TSMC and CEA-Leti has resolved 22-nm lines, spaces and contract holes in positive chemically amplified resist. This is said to be sufficiently dense for 14-nm and 10-nm logic manufacturing process technology nodes.
CEA-Leti has had a pre-alpha machine since mid-2009. Now CEA-Leti will receive one of the first Matrix systems to enable continuation of the Imagine research program for three years more years.
Related links and articles:
www.mapperlithography.com
www.rusnano.com
News articles:
TSMC set to receive Matrix e-beam litho machine
Maskless e-beam litho good for 14-nm, says CEA-Leti
Russia drives into U.S. fabless funding
Crocus appoints CEO for Russian MRAM fab
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resistion
8/28/2012 11:02 AM EDT
Does Mapper approve its lens system to be made at the Russian site? Is that site even qualified to do it?
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peter.clarke
8/28/2012 12:33 PM EDT
@resistion
The information about Russian manufacture of key components came from Mapper so I should think they are OK with it.
It is basically the price of the $50 million that Rusnano is putting up.
Many of Rusnano's deals have had a local (Russian) manufacturing element to them.
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