
MEMS integration issues debated
High on the list of obstacles slowing the proliferation of silicon micromachines
is the task of integrating the sensors of microelectromechanical systems with signal-conditioning
circuitry on the same CMOS chip. When Roger Grace, president of the Micro and Nanotechnology
Commercialization Education Foundation and president of Roger Grace Associates (Naples, Fla.),
called this phenomenon to our attention, the theme of this InFocus section was established.

Performance grows with integration
MEMS integration carries advantages, risks
For mixed-signal, roll multiple MEMS dice
Optical switch benefits from off-chip drive
Weighing packaging solutions

Volatility beta guides MEMS investments
MEMS-IC integration remains a challenge