Breaking News
Comments
Newest First | Oldest First | Threaded View
<<   <   Page 2 / 2
me3
User Rank
Rookie
re: Lithography roadmap offers questions and openings
me3   7/16/2010 7:08:51 PM
NO RATINGS
While Intel marches on and on and on with a few fully depreciated steppers ..... Why the genius at GF doesn't notice? And they just separated design from manufacturing.

jokosa
User Rank
Rookie
re: Lithography roadmap offers questions and openings
jokosa   7/16/2010 6:46:40 PM
NO RATINGS
Whatever happened to interferometry nodes? I have not heard of them for 10 years, but coupled with todays spacial patterning it seems like an idea ready for more research...

resistion
User Rank
Manager
re: Lithography roadmap offers questions and openings
resistion   7/16/2010 4:38:04 PM
NO RATINGS
The replication part is great but beam conditions drift which can cause overlay problems or other defects given enough time. Maybe multibeam + imprint is the answer?

walken1
User Rank
Rookie
re: Lithography roadmap offers questions and openings
walken1   7/16/2010 3:21:30 PM
NO RATINGS
If memory serves me correctly, the master imprint mask is written with an e-beam writer, but the replica masks are produced using the same nanoimprint process used for IC production -- the master mask imprints the replica masks. So e-beam write times shouldn't be a major factor.

unknown multiplier
User Rank
Rookie
re: Lithography roadmap offers questions and openings
unknown multiplier   7/16/2010 12:05:55 PM
NO RATINGS
I'd imagine if EUV tools were available in 2011-2012, some companies would still be able to skip immersion and double patterning entirely, catching up to those who bought EUV, and immersion, and double patterning. The dragging out of 193 nm technology has enabled leaders to keep their lead.

resistion
User Rank
Manager
re: Lithography roadmap offers questions and openings
resistion   7/16/2010 7:42:40 AM
NO RATINGS
Mind the ebeam write time for those imprint masks!

<<   <   Page 2 / 2


Flash Poll
EE Life
Frankenstein's Fix, Teardowns, Sideshows, Design Contests, Reader Content & More
Max Maxfield

MSGEQ7-Based DIY Audio Spectrum Analyzer: Testing
Max Maxfield
13 comments
In my previous column on this topic, we discussed the step-by-step construction of the first pass at a MSGEQ7-based DIY audio spectrum analyzer for use in my BADASS Display project. Of ...

Karen Field

June 2014 Cartoon Caption Winner
Karen Field
13 comments
Congratulations to "Wnderer" for submitting the winning caption for our June cartoon, after much heated conversation by our judges, given the plethora of great entries.

Jeremy Cook

Inspection Rejection: Why More Is Less in a Vision System
Jeremy Cook
3 comments
Albert Einstein has been quoted as saying, "Everything should be as simple as possible, but not simpler." I would never claim to have his level of insight -- or such an awesome head of ...

Jeremy Cook

Machine Fixes That Made Me Go 'DUH!'
Jeremy Cook
21 comments
As you can see in my bio at the end of this article, I work as a manufacturing engineer. One of my favorite things that happens on a Friday late in the afternoon is to hear my phone ring ...

Top Comments of the Week
Like Us on Facebook
EE Times on Twitter
EE Times Twitter Feed

Datasheets.com Parts Search

185 million searchable parts
(please enter a part number or hit search to begin)