Breaking News
Comments
Newest First | Oldest First | Threaded View
double-o-nothing
User Rank
Rookie
re: EUV: Gaining steam or more hype?
double-o-nothing   7/25/2010 6:33:14 AM
NO RATINGS
Resist tends to have molecular aggregates ~20-40 nm scale. Much like metal film granularity, it would also limit the resolution.

old account Frank Eory
User Rank
Rookie
re: EUV: Gaining steam or more hype?
old account Frank Eory   7/22/2010 8:19:23 PM
NO RATINGS
By the time EUV is ready for production, will it actually offer much cost savings compared to double patterning?

greenpattern
User Rank
Rookie
re: EUV: Gaining steam or more hype?
greenpattern   7/22/2010 2:02:52 PM
NO RATINGS
From what I read, besides the source and the mask, the resist is still under exploration. Stable resist molecules could be too big.

resistion
User Rank
CEO
re: EUV: Gaining steam or more hype?
resistion   7/22/2010 4:57:46 AM
NO RATINGS
It's always the same analysts, same vendor, same company people cheering EUV. So I do think it is hype. But just look objectively at the numbers for 3100 and 3300. It is already admitted that the throughput for 3100 is not sufficient for production. So clearly buying it is simply for learning, indicating that it is largely a mystery with lots of risk for whoever bought it. And that said, the 3300 (designed but not yet built) only offers modest 22 nm resolution, which is not the optical limit but calculated from some other considerations (resist, flare). I think too much money has been spent money over too long a duration. EUV qualifies as pork barrel. The fact that 193 nm has been extended this far indicates how much EUV has been a let down. In the 1990's there was some work on using STM for lithography. I think 20 years of development could have been targeted on developing the parallelism for a high-throughput approach there.



Flash Poll
Top Comments of the Week
Like Us on Facebook
EE Times on Twitter
EE Times Twitter Feed

Datasheets.com Parts Search

185 million searchable parts
(please enter a part number or hit search to begin)
EE Life
Frankenstein's Fix, Teardowns, Sideshows, Design Contests, Reader Content & More
Max Maxfield

Saddleback Sale – It's Happy Dance Time
Max Maxfield
Post a comment
It's no secret that I'm a huge fan of the products from Saddleback Leather. As I sit here at my desk, I'm wearing one of their 1¾" wide Tow Belts, upon which rests one of their Belt ...

Engineering Investigations

Air Conditioner Falls From Window, Still Works
Engineering Investigations
Post a comment
It's autumn in New England. The leaves are turning to red, orange, and gold, my roses are in their second bloom, and it's time to remove the air conditioner from the window. On September ...

David Blaza

The Other Tesla
David Blaza
5 comments
I find myself going to Kickstarter and Indiegogo on a regular basis these days because they have become real innovation marketplaces. As far as I'm concerned, this is where a lot of cool ...

Larry Desjardin

Engineers Should Study Finance: 5 Reasons Why
Larry Desjardin
47 comments
I'm a big proponent of engineers learning financial basics. Why? Because engineers are making decisions all the time, in multiple ways. Having a good financial understanding guides these ...