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double-o-nothing
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re: ASML rolls predictive modeling tool for EUV
double-o-nothing   9/14/2010 1:26:16 PM
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Wikipedia article on EUV more intelligent source than ASML.

resistion
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re: ASML rolls predictive modeling tool for EUV
resistion   9/20/2010 5:49:41 PM
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Yeah the model for any sub-30nm optical system is of little practical use due to resist blur.



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