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double-o-nothing
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re: Sokudo joins CEA-Leti's e-beam litho project
double-o-nothing   9/17/2010 3:11:48 AM
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Multi-beam system developers should consider what happened to field-emission displays. What happens when an emitter fails in the middle of a batch? Swap out and recalibrate?

resistion
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re: Sokudo joins CEA-Leti's e-beam litho project
resistion   9/16/2010 11:23:07 PM
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Sokudo is a vendor positioned and trying to keep options/opportunities open. If it saw the potential, it would do the same for imprint for example. It is already addressing double patterning flows.

wilber_xbox
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re: Sokudo joins CEA-Leti's e-beam litho project
wilber_xbox   9/16/2010 8:21:49 PM
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looks like baby is growing to take on the world! Always a pleasure to read about any growth related article about the multi e-beam concept. Its still time to give a little more push to multi e-beam technology. Any technology, no matter how promising, can not survive and grow without industry helping it. Big players need to chip in both money and confidence to give this alternative to EUV technology a fighting chance. Hope to read more in the near future.

pixies
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re: Sokudo joins CEA-Leti's e-beam litho project
pixies   9/16/2010 3:59:14 PM
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It is interesting to see e-beam picking up momentum while EUV keeps disappoint the litho community.



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