This is a really nice piece, thanks very much. Perhaps some comments, more general in nature, are in order.
First, going down below 40 nm, no matter what radiation you use, the resist is going to limit you, either in throughput or resolution. Particularly these chemically amplified types.
Second, at the same dose, smaller features use less incident particles (photons, electrons, etc.) so are naturally more prone to random dose variations (sometimes called shot noise).
Third, the CD vs dose model needs to be discussed much more openly especially as more critical features are being added.
Replay available now: A handful of emerging network technologies are competing to be the preferred wide-area connection for the Internet of Things. All claim lower costs and power use than cellular but none have wide deployment yet. Listen in as proponents of leading contenders make their case to be the metro or national IoT network of the future. Rick Merritt, EE Times Silicon Valley Bureau Chief, moderators this discussion. Join in and ask his guests questions.