Breaking News
Comments
Newest First | Oldest First | Threaded View
unknown multiplier
User Rank
Rookie
re: E-beam: Ecosystem investment grows, but more neede
unknown multiplier   11/15/2010 2:16:52 PM
NO RATINGS
Isn't it just one more random electron scattering factor?

double-o-nothing
User Rank
Rookie
re: E-beam: Ecosystem investment grows, but more neede
double-o-nothing   11/15/2010 1:06:47 PM
NO RATINGS
Charging is another inevitable factor that needs to be possibly captured by DFEB.

double-o-nothing
User Rank
Rookie
re: E-beam: Ecosystem investment grows, but more neede
double-o-nothing   9/23/2010 12:13:10 PM
NO RATINGS
This is a really nice piece, thanks very much. Perhaps some comments, more general in nature, are in order. First, going down below 40 nm, no matter what radiation you use, the resist is going to limit you, either in throughput or resolution. Particularly these chemically amplified types. Second, at the same dose, smaller features use less incident particles (photons, electrons, etc.) so are naturally more prone to random dose variations (sometimes called shot noise). Third, the CD vs dose model needs to be discussed much more openly especially as more critical features are being added.



Flash Poll
Top Comments of the Week
Like Us on Facebook
EE Times on Twitter
EE Times Twitter Feed

Datasheets.com Parts Search

185 million searchable parts
(please enter a part number or hit search to begin)
EE Life
Frankenstein's Fix, Teardowns, Sideshows, Design Contests, Reader Content & More
Max Maxfield

Saddleback Sale – It's Happy Dance Time
Max Maxfield
Post a comment
It's no secret that I'm a huge fan of the products from Saddleback Leather. As I sit here at my desk, I'm wearing one of their 1¾" wide Tow Belts, upon which rests one of their Belt ...

Engineering Investigations

Air Conditioner Falls From Window, Still Works
Engineering Investigations
Post a comment
It's autumn in New England. The leaves are turning to red, orange, and gold, my roses are in their second bloom, and it's time to remove the air conditioner from the window. On September ...

David Blaza

The Other Tesla
David Blaza
5 comments
I find myself going to Kickstarter and Indiegogo on a regular basis these days because they have become real innovation marketplaces. As far as I'm concerned, this is where a lot of cool ...

Larry Desjardin

Engineers Should Study Finance: 5 Reasons Why
Larry Desjardin
47 comments
I'm a big proponent of engineers learning financial basics. Why? Because engineers are making decisions all the time, in multiple ways. Having a good financial understanding guides these ...