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unknown multiplier
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re: E-beam: Ecosystem investment grows, but more neede
unknown multiplier   11/15/2010 2:16:52 PM
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Isn't it just one more random electron scattering factor?

double-o-nothing
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re: E-beam: Ecosystem investment grows, but more neede
double-o-nothing   11/15/2010 1:06:47 PM
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Charging is another inevitable factor that needs to be possibly captured by DFEB.

double-o-nothing
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re: E-beam: Ecosystem investment grows, but more neede
double-o-nothing   9/23/2010 12:13:10 PM
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This is a really nice piece, thanks very much. Perhaps some comments, more general in nature, are in order. First, going down below 40 nm, no matter what radiation you use, the resist is going to limit you, either in throughput or resolution. Particularly these chemically amplified types. Second, at the same dose, smaller features use less incident particles (photons, electrons, etc.) so are naturally more prone to random dose variations (sometimes called shot noise). Third, the CD vs dose model needs to be discussed much more openly especially as more critical features are being added.



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As data rates begin to move beyond 25 Gbps channels, new problems arise. Getting to 50 Gbps channels might not be possible with the traditional NRZ (2-level) signaling. PAM4 lets data rates double with only a small increase in channel bandwidth by sending two bits per symbol. But, it brings new measurement and analysis problems. Signal integrity sage Ransom Stephens will explain how PAM4 differs from NRZ and what to expect in design, measurement, and signal analysis.

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