This is a really nice piece, thanks very much. Perhaps some comments, more general in nature, are in order.
First, going down below 40 nm, no matter what radiation you use, the resist is going to limit you, either in throughput or resolution. Particularly these chemically amplified types.
Second, at the same dose, smaller features use less incident particles (photons, electrons, etc.) so are naturally more prone to random dose variations (sometimes called shot noise).
Third, the CD vs dose model needs to be discussed much more openly especially as more critical features are being added.
What are the engineering and design challenges in creating successful IoT devices? These devices are usually small, resource-constrained electronics designed to sense, collect, send, and/or interpret data. Some of the devices need to be smart enough to act upon data in real time, 24/7. Are the design challenges the same as with embedded systems, but with a little developer- and IT-skills added in? What do engineers need to know? Rick Merritt talks with two experts about the tools and best options for designing IoT devices in 2016. Specifically the guests will discuss sensors, security, and lessons from IoT deployments.