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unknown multiplier
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re: IBM,Toppan extend litho for 14-nm
unknown multiplier   1/18/2011 12:11:45 PM
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It's probably 3 or 4 exposures like Intel's 15 nm.

entity279
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re: IBM,Toppan extend litho for 14-nm
entity279   1/18/2011 8:18:59 AM
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Then again, IBM has a habit in picking/researching expensive manufacturing techniques

double-o-nothing
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re: IBM,Toppan extend litho for 14-nm
double-o-nothing   1/17/2011 11:42:24 PM
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14 nm is so below ArF wavelength diffraction limit, wavelength is a laughable justification for EUV.

pixies
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re: IBM,Toppan extend litho for 14-nm
pixies   1/17/2011 7:28:41 PM
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Only IBM can afford the huge computing power necessary to apply inverse lithography to 14 nm.



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