Embedded Systems Conference
Breaking News
Comments
Newest First | Oldest First | Threaded View
<<   <   Page 2 / 2
EUV OR BUST
User Rank
Author
re: EUV litho era begins, but is it ready?
EUV OR BUST   2/2/2011 7:55:51 PM
NO RATINGS
http://www.asml.com/doclib/press/asml_20101006_SEMICON_West_2010_ASML_EUVL_final_handout.pdf

EUV OR BUST
User Rank
Author
re: EUV litho era begins, but is it ready?
EUV OR BUST   2/2/2011 7:49:33 PM
NO RATINGS
Industry is not in trouble, given the fact EUV is a little bit later than planed. I think economic situation is a bigger problem for the future, when it's down there are only a few company's that wil invest in R&D.

SiFarmer (Ret.)
User Rank
Author
re: EUV litho era begins, but is it ready?
SiFarmer (Ret.)   2/2/2011 6:19:40 PM
NO RATINGS
A bit more details please. What's the NXE:3100's laser source and lens material?

mark.lapedus
User Rank
Author
re: EUV litho era begins, but is it ready?
mark.lapedus   2/2/2011 5:01:32 PM
NO RATINGS
Is industry in trouble, given EUV is late to the party?

EUV OR BUST
User Rank
Author
re: EUV litho era begins, but is it ready?
EUV OR BUST   2/2/2011 2:14:30 PM
NO RATINGS
Almost all customers shared interest in euv in 2010: Delivery of the NXE:3100 is another story and only some people at asml knows when delivery of the next system will start. All customers want their tools as early as possible

resistion
User Rank
Author
re: EUV litho era begins, but is it ready?
resistion   2/2/2011 1:42:01 PM
NO RATINGS
Ok, then this would be an important data point. Checking the old news, TSMC declared their interest in early 2010 but did not plan to get it in 2010.

EUV OR BUST
User Rank
Author
re: EUV litho era begins, but is it ready?
EUV OR BUST   2/2/2011 9:44:03 AM
NO RATINGS
@t resistion. Samsung is the first customer of the NXE:3100

resistion
User Rank
Author
re: EUV litho era begins, but is it ready?
resistion   2/2/2011 9:17:42 AM
NO RATINGS
I knew something else read funny. Didn't TSMC get first NXE:3100 before Samsung?

double-o-nothing
User Rank
Author
re: EUV litho era begins, but is it ready?
double-o-nothing   2/2/2011 7:19:47 AM
NO RATINGS
So if I understand it right, the tpt of the preproduction 3100 is 10-12 wph instead of 60, well short of spec.

resistion
User Rank
Author
re: EUV litho era begins, but is it ready?
resistion   2/2/2011 6:50:10 AM
NO RATINGS
Can't claim EUV litho era has started, when no infrastructure exists. 2015 doesn't look feasible anymore. Device damage also hasn't been covered yet.

<<   <   Page 2 / 2


Top Comments of the Week
Flash Poll
Radio
LATEST ARCHIVED BROADCAST
EE Times Senior Technical Editor Martin Rowe will interview EMC engineer Kenneth Wyatt.
Like Us on Facebook

Datasheets.com Parts Search

185 million searchable parts
(please enter a part number or hit search to begin)
Special Video Section
After a four-year absence, Infineon returns to Mobile World ...
A laptop’s 65-watt adapter can be made 6 times smaller and ...
An industry network should have device and data security at ...
The LTC2975 is a four-channel PMBus Power System Manager ...
In this video, a new high speed CMOS output comparator ...
The LT8640 is a 42V, 5A synchronous step-down regulator ...
The LTC2000 high-speed DAC has low noise and excellent ...
How do you protect the load and ensure output continues to ...
General-purpose DACs have applications in instrumentation, ...
Linear Technology demonstrates its latest measurement ...
10:29
Demos from Maxim Integrated at Electronica 2014 show ...
Bosch CEO Stefan Finkbeiner shows off latest combo and ...
STMicroelectronics demoed this simple gesture control ...
Keysight shows you what signals lurk in real-time at 510MHz ...
TE Connectivity's clear-plastic, full-size model car shows ...
Why culture makes Linear Tech a winner.
Recently formed Architects of Modern Power consortium ...
Specially modified Corvette C7 Stingray responds to ex Indy ...
Avago’s ACPL-K30T is the first solid-state driver qualified ...
NXP launches its line of multi-gate, multifunction, ...