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resistion
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re: EUV litho era begins, but is it ready?
resistion   2/2/2011 6:50:10 AM
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Can't claim EUV litho era has started, when no infrastructure exists. 2015 doesn't look feasible anymore. Device damage also hasn't been covered yet.

double-o-nothing
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re: EUV litho era begins, but is it ready?
double-o-nothing   2/2/2011 7:19:47 AM
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So if I understand it right, the tpt of the preproduction 3100 is 10-12 wph instead of 60, well short of spec.

resistion
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re: EUV litho era begins, but is it ready?
resistion   2/2/2011 9:17:42 AM
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I knew something else read funny. Didn't TSMC get first NXE:3100 before Samsung?

EUV OR BUST
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re: EUV litho era begins, but is it ready?
EUV OR BUST   2/2/2011 9:44:03 AM
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@t resistion. Samsung is the first customer of the NXE:3100

resistion
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re: EUV litho era begins, but is it ready?
resistion   2/2/2011 1:42:01 PM
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Ok, then this would be an important data point. Checking the old news, TSMC declared their interest in early 2010 but did not plan to get it in 2010.

EUV OR BUST
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re: EUV litho era begins, but is it ready?
EUV OR BUST   2/2/2011 2:14:30 PM
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Almost all customers shared interest in euv in 2010: Delivery of the NXE:3100 is another story and only some people at asml knows when delivery of the next system will start. All customers want their tools as early as possible

mark.lapedus
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re: EUV litho era begins, but is it ready?
mark.lapedus   2/2/2011 5:01:32 PM
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Is industry in trouble, given EUV is late to the party?

SiFarmer (Ret.)
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re: EUV litho era begins, but is it ready?
SiFarmer (Ret.)   2/2/2011 6:19:40 PM
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A bit more details please. What's the NXE:3100's laser source and lens material?

EUV OR BUST
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re: EUV litho era begins, but is it ready?
EUV OR BUST   2/2/2011 7:49:33 PM
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Industry is not in trouble, given the fact EUV is a little bit later than planed. I think economic situation is a bigger problem for the future, when it's down there are only a few company's that wil invest in R&D.

EUV OR BUST
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re: EUV litho era begins, but is it ready?
EUV OR BUST   2/2/2011 7:55:51 PM
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http://www.asml.com/doclib/press/asml_20101006_SEMICON_West_2010_ASML_EUVL_final_handout.pdf

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