Design Con 2015
Breaking News
Comments
Newest First | Oldest First | Threaded View
<<   <   Page 2 / 2
double-o-nothing
User Rank
Rookie
re: MIT scientists claim 9-nm e-beam resolution
double-o-nothing   7/5/2011 1:05:10 PM
NO RATINGS
I think they will have problem with positive charging of the surface.

agk
User Rank
Rookie
re: MIT scientists claim 9-nm e-beam resolution
agk   7/5/2011 8:13:46 AM
NO RATINGS
To speed up the e-beam and make it more shaper reaching 9nm is excellent research and the scanning method instead of integral method made this win for the researchers.

resistion
User Rank
CEO
re: MIT scientists claim 9-nm e-beam resolution
resistion   7/5/2011 5:33:07 AM
NO RATINGS
The abstract read that all structures with 15 nm hp and above were fully resolved, but smaller ones had some resist residues. 15 nm hp is also about the limit current demonstrated by spacer etching.

yalanand
User Rank
Rookie
re: MIT scientists claim 9-nm e-beam resolution
yalanand   7/5/2011 4:41:25 AM
NO RATINGS
Is resolution of 9nm possible from other other technologies like Photomask ? If answer is no then inspite of throughput issues e-beam resolution will become attractive.

resistion
User Rank
CEO
re: MIT scientists claim 9-nm e-beam resolution
resistion   7/5/2011 4:04:16 AM
NO RATINGS
@markhahn: lol, good catch ;)

markhahn0
User Rank
Rookie
re: MIT scientists claim 9-nm e-beam resolution
markhahn0   7/5/2011 2:54:24 AM
NO RATINGS
I love the idea of "Extreme Ultraviolent UV" :)

resistion
User Rank
CEO
re: MIT scientists claim 9-nm e-beam resolution
resistion   7/5/2011 2:16:36 AM
NO RATINGS
The only thing I was impressed by was they could use few keV electrons, but the lithographic result is still too familiar, very rough lines and non-uniform dots in very thin resist. It is not a fault of the technique but a natural consequence of electrons being free to move after being released or injected in a film.

<<   <   Page 2 / 2


Top Comments of the Week
Flash Poll
Like Us on Facebook

Datasheets.com Parts Search

185 million searchable parts
(please enter a part number or hit search to begin)
EE Life
Frankenstein's Fix, Teardowns, Sideshows, Design Contests, Reader Content & More
<b><a href=Betajet">

The Circle – The Future's Imperfect in the Present Tense
Betajet
Post a comment
The Circle, a satirical, dystopian novel published in 2013 by San Francisco-based writer Dave Eggers, is about a large, very powerful technology company that combines aspects of Google, ...

Max Maxfield

Recommended Reads From the Engineer's Bookshelf
Max Maxfield
2 comments
I'm not sure if I read more than most folks or not, but I do I know that I spend quite a lot of time reading. I hate to be idle, so I always have a book or two somewhere about my person -- ...

Martin Rowe

No 2014 Punkin Chunkin, What Will You Do?
Martin Rowe
2 comments
American Thanksgiving is next week, and while some people watch (American) football all day, the real competition on TV has become Punkin Chunkin. But there will be no Punkin Chunkin on TV ...

Rich Quinnell

Making the Grade in Industrial Design
Rich Quinnell
15 comments
As every developer knows, there are the paper specifications for a product design, and then there are the real requirements. The paper specs are dry, bland, and rigidly numeric, making ...

Special Video Section
The LT8640 is a 42V, 5A synchronous step-down regulator ...
The LTC2000 high-speed DAC has low noise and excellent ...
How do you protect the load and ensure output continues to ...
General-purpose DACs have applications in instrumentation, ...
Linear Technology demonstrates its latest measurement ...
10:29
Demos from Maxim Integrated at Electronica 2014 show ...
Bosch CEO Stefan Finkbeiner shows off latest combo and ...
STMicroelectronics demoed this simple gesture control ...
Keysight shows you what signals lurk in real-time at 510MHz ...
TE Connectivity's clear-plastic, full-size model car shows ...
Why culture makes Linear Tech a winner.
Recently formed Architects of Modern Power consortium ...
Specially modified Corvette C7 Stingray responds to ex Indy ...
Avago’s ACPL-K30T is the first solid-state driver qualified ...
NXP launches its line of multi-gate, multifunction, ...
Doug Bailey, VP of marketing at Power Integrations, gives a ...
See how to ease software bring-up with DesignWare IP ...
DesignWare IP Prototyping Kits enable fast software ...
This video explores the LT3086, a new member of our LDO+ ...
In today’s modern electronic systems, the need for power ...