Breaking News
Comments
Newest First | Oldest First | Threaded View
<<   <   Page 2 / 2
double-o-nothing
User Rank
Rookie
re: MIT scientists claim 9-nm e-beam resolution
double-o-nothing   7/5/2011 1:05:10 PM
NO RATINGS
I think they will have problem with positive charging of the surface.

agk
User Rank
Rookie
re: MIT scientists claim 9-nm e-beam resolution
agk   7/5/2011 8:13:46 AM
NO RATINGS
To speed up the e-beam and make it more shaper reaching 9nm is excellent research and the scanning method instead of integral method made this win for the researchers.

resistion
User Rank
Manager
re: MIT scientists claim 9-nm e-beam resolution
resistion   7/5/2011 5:33:07 AM
NO RATINGS
The abstract read that all structures with 15 nm hp and above were fully resolved, but smaller ones had some resist residues. 15 nm hp is also about the limit current demonstrated by spacer etching.

yalanand
User Rank
Rookie
re: MIT scientists claim 9-nm e-beam resolution
yalanand   7/5/2011 4:41:25 AM
NO RATINGS
Is resolution of 9nm possible from other other technologies like Photomask ? If answer is no then inspite of throughput issues e-beam resolution will become attractive.

resistion
User Rank
Manager
re: MIT scientists claim 9-nm e-beam resolution
resistion   7/5/2011 4:04:16 AM
NO RATINGS
@markhahn: lol, good catch ;)

markhahn0
User Rank
Rookie
re: MIT scientists claim 9-nm e-beam resolution
markhahn0   7/5/2011 2:54:24 AM
NO RATINGS
I love the idea of "Extreme Ultraviolent UV" :)

resistion
User Rank
Manager
re: MIT scientists claim 9-nm e-beam resolution
resistion   7/5/2011 2:16:36 AM
NO RATINGS
The only thing I was impressed by was they could use few keV electrons, but the lithographic result is still too familiar, very rough lines and non-uniform dots in very thin resist. It is not a fault of the technique but a natural consequence of electrons being free to move after being released or injected in a film.

<<   <   Page 2 / 2


Flash Poll
EE Life
Frankenstein's Fix, Teardowns, Sideshows, Design Contests, Reader Content & More
Rishabh N. Mahajani, High School Senior and Future Engineer

Future Engineers: Don’t 'Trip Up' on Your College Road Trip
Rishabh N. Mahajani, High School Senior and Future Engineer
2 comments
A future engineer shares his impressions of a recent tour of top schools and offers advice on making the most of the time-honored tradition of the college road trip.

Max Maxfield

Juggling a Cornucopia of Projects
Max Maxfield
7 comments
I feel like I'm juggling a lot of hobby projects at the moment. The problem is that I can't juggle. Actually, that's not strictly true -- I can juggle ten fine china dinner plates, but ...

Larry Desjardin

Engineers Should Study Finance: 5 Reasons Why
Larry Desjardin
37 comments
I'm a big proponent of engineers learning financial basics. Why? Because engineers are making decisions all the time, in multiple ways. Having a good financial understanding guides these ...

Karen Field

July Cartoon Caption Contest: Let's Talk Some Trash
Karen Field
140 comments
Steve Jobs allegedly got his start by dumpster diving with the Computer Club at Homestead High in the early 1970s.

Top Comments of the Week
Like Us on Facebook
EE Times on Twitter
EE Times Twitter Feed

Datasheets.com Parts Search

185 million searchable parts
(please enter a part number or hit search to begin)