Design Con 2015
Breaking News
Comments
Oldest First | Newest First | Threaded View
Page 1 / 2   >   >>
resistion
User Rank
CEO
re: MIT scientists claim 9-nm e-beam resolution
resistion   7/5/2011 2:16:36 AM
NO RATINGS
The only thing I was impressed by was they could use few keV electrons, but the lithographic result is still too familiar, very rough lines and non-uniform dots in very thin resist. It is not a fault of the technique but a natural consequence of electrons being free to move after being released or injected in a film.

markhahn0
User Rank
Rookie
re: MIT scientists claim 9-nm e-beam resolution
markhahn0   7/5/2011 2:54:24 AM
NO RATINGS
I love the idea of "Extreme Ultraviolent UV" :)

resistion
User Rank
CEO
re: MIT scientists claim 9-nm e-beam resolution
resistion   7/5/2011 4:04:16 AM
NO RATINGS
@markhahn: lol, good catch ;)

yalanand
User Rank
Rookie
re: MIT scientists claim 9-nm e-beam resolution
yalanand   7/5/2011 4:41:25 AM
NO RATINGS
Is resolution of 9nm possible from other other technologies like Photomask ? If answer is no then inspite of throughput issues e-beam resolution will become attractive.

resistion
User Rank
CEO
re: MIT scientists claim 9-nm e-beam resolution
resistion   7/5/2011 5:33:07 AM
NO RATINGS
The abstract read that all structures with 15 nm hp and above were fully resolved, but smaller ones had some resist residues. 15 nm hp is also about the limit current demonstrated by spacer etching.

agk
User Rank
Rookie
re: MIT scientists claim 9-nm e-beam resolution
agk   7/5/2011 8:13:46 AM
NO RATINGS
To speed up the e-beam and make it more shaper reaching 9nm is excellent research and the scanning method instead of integral method made this win for the researchers.

double-o-nothing
User Rank
Rookie
re: MIT scientists claim 9-nm e-beam resolution
double-o-nothing   7/5/2011 1:05:10 PM
NO RATINGS
I think they will have problem with positive charging of the surface.

anon7584804
User Rank
Rookie
re: MIT scientists claim 9-nm e-beam resolution
anon7584804   7/5/2011 3:34:15 PM
NO RATINGS
go beam go.. thanks for opening doors for future & further

goafrit
User Rank
Manager
re: MIT scientists claim 9-nm e-beam resolution
goafrit   7/5/2011 9:16:34 PM
NO RATINGS
I have no doubt provided it is from MIT. Those guys are awesome.

resistion
User Rank
CEO
re: MIT scientists claim 9-nm e-beam resolution
resistion   7/6/2011 11:04:06 AM
NO RATINGS
Now it makes me wonder, why not use a SEM and low-k as resist?

Page 1 / 2   >   >>


Flash Poll
Top Comments of the Week
Like Us on Facebook
EE Times on Twitter
EE Times Twitter Feed

Datasheets.com Parts Search

185 million searchable parts
(please enter a part number or hit search to begin)
EE Life
Frankenstein's Fix, Teardowns, Sideshows, Design Contests, Reader Content & More
Max Maxfield

DIY Practical Joke Project Idea
Max Maxfield
11 comments
I just received a rather interesting email from a member of the EETimes community who prefers to remain anonymous. This message was as follows:

Jolt Judges and Andrew Binstock

Jolt Awards: The Best Books
Jolt Judges and Andrew Binstock
1 Comment
As we do every year, Dr. Dobb's recognizes the best books of the last 12 months via the Jolt Awards -- our cycle of product awards given out every two months in each of six categories. No ...

Engineering Investigations

Air Conditioner Falls From Window, Still Works
Engineering Investigations
2 comments
It's autumn in New England. The leaves are turning to red, orange, and gold, my roses are in their second bloom, and it's time to remove the air conditioner from the window. On September ...

David Blaza

The Other Tesla
David Blaza
5 comments
I find myself going to Kickstarter and Indiegogo on a regular basis these days because they have become real innovation marketplaces. As far as I'm concerned, this is where a lot of cool ...