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vincelodato
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Rookie
re: ASML says EUV on track for 2013
vincelodato   9/11/2012 10:45:21 PM
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years ago I worked for PE which became svgl now it is ASML...I remember microscan twinscan etc etc....but most of all our little company BBE was ahead of ASML and it is now 20 years....Charlie K of PE, Frank Reidel of PE both dead now...and I am the only one left...we were and are ahead of our times.....BBE, xray stepper just google....

resistion
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Manager
re: ASML says EUV on track for 2013
resistion   11/6/2011 2:40:08 PM
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ASML immersion backlog is currently about 50% of the installed base, the industry bet is on immersion extension by multiple patterning, starting 2012-3.

unknown multiplier
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re: ASML says EUV on track for 2013
unknown multiplier   10/14/2011 3:18:23 PM
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Mainstream lithography was never determined by resolution or even cost, but by throughput. So e-beam got replaced by optical, even as optical was much more complex.

resistion
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Manager
re: ASML says EUV on track for 2013
resistion   10/13/2011 12:15:12 AM
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It missed 22 nm logic/foundry, that's already too late.

pixies
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Rookie
re: ASML says EUV on track for 2013
pixies   10/12/2011 10:01:57 PM
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But if it does not happen soon, it will never happen for volume production. The window is closing quickly.

elctrnx_lyf
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Manager
re: ASML says EUV on track for 2013
elctrnx_lyf   10/12/2011 5:34:07 PM
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I just wonder how the asmc sales are so positive even while there is a dip in the sales of semiconductor in general.

any1
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CEO
re: ASML says EUV on track for 2013
any1   10/12/2011 1:02:14 PM
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I just don't see it happening anytime soon for EUV litho. There are so many issues that still need to be addressed. I see only more delays ahead. A 2015 insertion point for "real manufacturing" seems optimistic to me.

resistion
User Rank
Manager
re: ASML says EUV on track for 2013
resistion   10/12/2011 8:19:39 AM
NO RATINGS
But these EUV scanners can't even do 15 nm!



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