"output equivalent" is not same as actual output. And the intermediate focus power has to increase to keep the same throughput for smaller features. It is not a fixed 100 W target.
EUV production is such a highly inefficient process, the very opposite of green. So much energy going in, only for low efficiency production of radiation at many wavelengths over a broad range, all of which (except one) are then re-absorbed (i.e., wasted).
At least excimer lasers produce a very narrow wavelength range.
NASA's Orion Flight Software Production Systems Manager Darrel G. Raines joins Planet Analog Editor Steve Taranovich and Embedded.com Editor Max Maxfield to talk about embedded flight software used on the Mars on EE Times Radio. Live radio show and live chat. Get your questions ready.