Breaking News
Comments
resistion
User Rank
CEO
re: EUV litho source is much brighter, says Ushio
resistion   10/31/2011 3:01:53 PM
NO RATINGS
"output equivalent" is not same as actual output. And the intermediate focus power has to increase to keep the same throughput for smaller features. It is not a fixed 100 W target. EUV production is such a highly inefficient process, the very opposite of green. So much energy going in, only for low efficiency production of radiation at many wavelengths over a broad range, all of which (except one) are then re-absorbed (i.e., wasted). At least excimer lasers produce a very narrow wavelength range.

double-o-nothing
User Rank
Rookie
re: EUV litho source is much brighter, says Ushio
double-o-nothing   11/9/2011 5:24:31 AM
NO RATINGS
If EUV is going to require double patterning, as has been suggested for the NXE 3300, the throughput is never going to catch up, and the cost effectiveness justification is gone.

resistion
User Rank
CEO
re: EUV litho source is much brighter, says Ushio
resistion   11/9/2011 7:09:39 AM
NO RATINGS
If EUV's first node already requires double patterning, its third node will require quadruple.

resistion
User Rank
CEO
re: EUV litho source is much brighter, says Ushio
resistion   5/13/2013 4:37:56 PM
NO RATINGS
Just read Ushio no longer supporting this activity. I think they saw the writing on the wall. http://www.businesswire.com/news/home/20130509005460/en/USHIO-Consolidate-EUV-Business-Single-Unit-Japan

adelestuart
User Rank
Rookie
re: EUV litho source is much brighter, says Ushio
adelestuart   6/20/2013 10:18:43 AM
NO RATINGS
if they say so then is a good thing. http://www.yachtbooker.de/Yachtcharter-murter.html



EE Life
Frankenstein's Fix, Teardowns, Sideshows, Design Contests, Reader Content & More
Max Maxfield

Dr. Duino Diagnostic Shield Deduces Dilemmas in Arduino Shield Stacks
Max Maxfield
9 comments
As you are probably aware, I'm spending a lot of my free time creating Arduino-based projects, such as my Inamorata Prognostication Engine, my BADASS Display, and my Vetinari Clock.

EDN Staff

11 Summer Vacation Spots for Engineers
EDN Staff
20 comments
This collection of places from technology history, museums, and modern marvels is a roadmap for an engineering adventure that will take you around the world. Here are just a few spots ...

Glen Chenier

Engineers Solve Analog/Digital Problem, Invent Creative Expletives
Glen Chenier
15 comments
- An analog engineer and a digital engineer join forces, use their respective skills, and pull a few bunnies out of a hat to troubleshoot a system with which they are completely ...

Larry Desjardin

Engineers Should Study Finance: 5 Reasons Why
Larry Desjardin
46 comments
I'm a big proponent of engineers learning financial basics. Why? Because engineers are making decisions all the time, in multiple ways. Having a good financial understanding guides these ...

Flash Poll
Top Comments of the Week
Like Us on Facebook
EE Times on Twitter
EE Times Twitter Feed

Datasheets.com Parts Search

185 million searchable parts
(please enter a part number or hit search to begin)