MEMs integration into CMOS will be the next big opportunity. Stand-alone MEMS in MCM or other exotic packaging may be cost prohibitive unless there are no options for such integration for performance or complexity reasons. MEMs oscillators especially could be a dying business since CMOS based XTAL osc replacement is possible (e.g. IDT or Silicon Labs). The performance gap has narrowed significantly for such oscillators compared to XTAL.
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