This is a great achievement. Integrating MEMs on CMOS chips will speed the proliferation and reduce the cost. I wonder how many additional layers/steps are required to do this. When EEPROM was integrated on the microcontroller chips, the problem is that the entire chip is now processed at the higher cost for the additional process steps. It can still be lower system cost, but customers expect the chip to be much lower price.
Baolab has started working on a no mans' land, this is really a remarkable achievement, it will surely going to create ease in the interfacing the MEMS and that will also tend to increase the use of MEMS in electronic devices.