I am just wondering how is the simulation of the mechanical part done. It is easy to simulate the electrical part but difficult to do so for the mechanical properties - they could change in the manufacturing process.
I was wondering how the designers were able to get it right on silicon. What is the under the hood simulation engine based on? Is it spice or something else altogether? Will this advanced tool allow for cheaper, more accurate MEMs in the near future? One can only hope and dream..