Electron microscopes have been converted to e-beam litho at a cost of about $100k that produce 20nm line widths. These can be used for very limited production. The new vector scan (shaped beams) are very expensive (I think they're over $6kk per machine), which makes it questionable whether it's practical to simply add more machines to make up for the lack of processing speed.
It depends on the cost of the machine. If it's maskless and does not require expensive EUV sources and mirrors, the machine could be potentially less expensive. In that case you just buy more machines to reach the production rate you want.
I think that are many companies that would use a 10 wafer per hour direct write ebeam tool. Mask costs near leading edge nodes are quite expensive - as are any alternative lithography approaches. And it's likely that throughput would be even higher at higher design nodes. For small volumes and rapid prototyping it would be valuable. And of course some people would be interested in it as a faster mask writing tool.
What are the engineering and design challenges in creating successful IoT devices? These devices are usually small, resource-constrained electronics designed to sense, collect, send, and/or interpret data. Some of the devices need to be smart enough to act upon data in real time, 24/7. Are the design challenges the same as with embedded systems, but with a little developer- and IT-skills added in? What do engineers need to know? Rick Merritt talks with two experts about the tools and best options for designing IoT devices in 2016. Specifically the guests will discuss sensors, security, and lessons from IoT deployments.