Design Con 2015
Breaking News
Newest First | Oldest First | Threaded View
User Rank
re: Maskless e-beam litho good for 14-nm , says CEA-Leti
resistion   2/22/2012 2:32:08 AM
If there is a fast (10-100 wph) low-energy (less than keV) e-beam ready at 14 nm or 10 nm, that would be an EUV-killer.

User Rank
re: Maskless e-beam litho good for 14-nm , says CEA-Leti
Brutus_II   2/14/2012 5:10:52 PM
Electron microscopes have been converted to e-beam litho at a cost of about $100k that produce 20nm line widths. These can be used for very limited production. The new vector scan (shaped beams) are very expensive (I think they're over $6kk per machine), which makes it questionable whether it's practical to simply add more machines to make up for the lack of processing speed.

User Rank
re: Maskless e-beam litho good for 14-nm , says CEA-Leti
DanielRavenNest   2/14/2012 1:00:28 AM
It depends on the cost of the machine. If it's maskless and does not require expensive EUV sources and mirrors, the machine could be potentially less expensive. In that case you just buy more machines to reach the production rate you want.

User Rank
re: Maskless e-beam litho good for 14-nm , says CEA-Leti
any1   2/14/2012 12:55:42 AM
I think that are many companies that would use a 10 wafer per hour direct write ebeam tool. Mask costs near leading edge nodes are quite expensive - as are any alternative lithography approaches. And it's likely that throughput would be even higher at higher design nodes. For small volumes and rapid prototyping it would be valuable. And of course some people would be interested in it as a faster mask writing tool.

User Rank
re: Maskless e-beam litho good for 14-nm , says CEA-Leti
mcgrathdylan   2/13/2012 7:00:23 PM
A promising development, but even if they make it to 10 wafers per hour, how many manufacturers will embrace this technology?

Top Comments of the Week
Flash Poll
Like Us on Facebook Parts Search

185 million searchable parts
(please enter a part number or hit search to begin)
EE Life
Frankenstein's Fix, Teardowns, Sideshows, Design Contests, Reader Content & More
Max Maxfield

Feast Your Orbs on My Vetinari Clock Prototype
Max Maxfield
Well, I have to admit that I have a great big Cheshire Cat-type grin plastered on my face at the moment, because the prototype for my Vetinari Clock project is now well underway.

Jack Ganssle,

Open Office: Your Fart is My Problem
Jack Ganssle,
A Washington Post article, Google got it wrong. The open-office trend is destroying the workplace, describes how the author's ad agency moved her from a private office to an open space ...

Rich Quinnell

Bloopers Book Helps Improve GUI Development
Rich Quinnell
Courtesy of fellow editor "Max" Maxfield (aka Max the Magnificent), I recently acquired a copy of GUI Bloopers 2.0 by Jeff Johnson of UI Wizards. I found it an interesting read chock full ...

Rich Quinnell

Making the Grade in Industrial Design
Rich Quinnell
As every developer knows, there are the paper specifications for a product design, and then there are the real requirements. The paper specs are dry, bland, and rigidly numeric, making ...

Special Video Section
The LT8640 is a 42V, 5A synchronous step-down regulator ...
The LTC2000 high-speed DAC has low noise and excellent ...
How do you protect the load and ensure output continues to ...
General-purpose DACs have applications in instrumentation, ...
Linear Technology demonstrates its latest measurement ...
Demos from Maxim Integrated at Electronica 2014 show ...
Bosch CEO Stefan Finkbeiner shows off latest combo and ...
STMicroelectronics demoed this simple gesture control ...
Keysight shows you what signals lurk in real-time at 510MHz ...
TE Connectivity's clear-plastic, full-size model car shows ...
Why culture makes Linear Tech a winner.
Recently formed Architects of Modern Power consortium ...
Specially modified Corvette C7 Stingray responds to ex Indy ...
Avago’s ACPL-K30T is the first solid-state driver qualified ...
NXP launches its line of multi-gate, multifunction, ...
Doug Bailey, VP of marketing at Power Integrations, gives a ...
See how to ease software bring-up with DesignWare IP ...
DesignWare IP Prototyping Kits enable fast software ...
This video explores the LT3086, a new member of our LDO+ ...
In today’s modern electronic systems, the need for power ...